Applied Materials 0190-91409 CDX200 XP Power CDX dual radio frequency (RF) generator.(New)

• Available 400kHz, 2MHz, 13.56MHz, 27.12MHz, 40.68MHz, or 60MHz choose any two.

• Regulated switch-mode DC section

• Up to 1.5kW per output - water cooled

• Class C amplifier & class D amplifier (all FED or LDMOS)

• 3U 19” rack mount

• DeviceNet, EtherCAT, RS232

AC input voltage 208, 400, or 480VAC; no neutral; 3 phase with ground. (1 phase available in some configurations)

AC Line Frequency 50/60Hz nominal.

AC Input Current 7.5A/phase (480V) typical, depends on output specification.

Output Characteristics Up to 1500W continuous forward power at the unit’s rear bulkhead RF connector into a 50Ω load. The forward power out is to track the

command set-point for any load conditions where the reflected power is less than 150W.

Accuracy/Regulation ±2W or ±2.0% of set-point, whichever is greater, from 10% to 100% max output, as measured by either the actual output power and/or

the forward analog readback signal.

Short Term Stability ±1.0% for output power set-point (10-100%) during one continuous hour of output.

Long Term Stability ±3.0% for output power set-point (10-100%) during 3 years of continuous output.

Rise Time Less than 200ms; from leading edge of enable signal to 90% of power level requested.CDX series